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| Coater P600MR.5 for PCB applications |
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Web Coaters series P600MR is our contribution in 21st century products.
Web Coaters of this series can easily be updated to Customer's requirements and ensure deposition of single layers or multi-layer stacks for touch panels, LCD, solar cells and solar control materials; they may be also used for the deposition of thick conductive metallic layers for FPCBs.
The single-sided coatings are deposited in three isolated compartments with a water-cooled process drum in each of them. In-line monitoring of coating parameters after each deposition zone ensures accurate maintenance of each deposited layer properties. Vertical arrangement of sputtering targets decreases contamination risk of the targets and coated web. Depending on the process required, various combinations of magnetrons are possible: double magnetron systems or single magnetrons, powered from DC or AC power supplies. Target materials are metal or ceramic.
The sputtering process is monitored with a multi-channel plasma emission spectrometer.
The drums heating/cooling system provides the possibility of significant functionality expansion. Special attention is paid to film surface pretreatment. The web first undergoes drying in Vacuum dryer C2P670, and then plasma treatment in the Coater.
The control system provides a fully automated process.
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| Substrate |
plastic webs
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| Web width |
up to 700 mm
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| Web thickness |
25-200 micron |
| Maximum roll diameter |
600 mm
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| Number of compartments |
6
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| Coating |
SiO2, ITO, TiO2, NiCr, Cu, TiN, Ti
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| Nominal sheet resistance (ITO layer) |
40-400 Ohm/sq
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| Thickness of Cu layer |
0.2 micron
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| Sputter equipment |
3 planar double magnetron
systems or 6 planar single magnetrons
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| Pre-treatment |
glow discharge |
| Winding speed |
0.5-5.0 m/min |
| In-line monitoring |
reflection, transmission and sheet resistance measurement |
| Drum temperature |
- 10...+ 25 °C |
| Pumping |
based on turbo molecular or cryogenic pumps |
| Overall dimensions |
14.5x10.0x3.7 m |
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